Element Determination

• Optical plasma emission spectroscopy (ICP-OES)
  Quantitative multi-element screening of aqueous solutions, acid mixtures and solids after digestion. Detection sensitivity in the ppb range.
• Plasma mass spectrometry (ICP-MS)
  Quantitative multi-element screening of aqueous solutions, acid mixtures and solids after digestion. Detection limits in the ppt range.
• Graphite furnace atomic absorption spectroscopy (GF-AAS)
  Quantitative determination of silicon in aqueous solutions down to the ppb range.
• Ion chromatography (IC)
  Determination of inorganic and organic anions and cations, as well as dissolved silicon. Detection limit in the ppt range after concentration.
• Halogen analysis:
  Determination of the total halogen content (F, Cl, Br, I) in inorganic and organic solids and liquids after thermal oxidation.
• Carbon determination (TOC)
  Determination of inorganic and organically bound C in aqueous solutions down to the ppb range.
• Elemental analysis of P and S:
  Determination in solutions and solids after pressure decomposition.
• Vapour Phase Decomposition (VPD-ICP-MS)
   Analysis of wafer contamination by etching with hydrofluoric acid vapours, using ICP-MS.
• Leach Out Tests according to SEMI F40 / F57

• IPC TM-650 Test

   

Surface Analysis

• Light Microscopy
  Color imaging of surfaces at high magnifications.
• Scanning Electron Microscopy with Energy-dispersive X-ray Spectroscopy (SEM/EDS)
  Examination of topography and composition at very high magnifications.
• Photoelectron Spectroscopy (XPS / ESCA)
  Surface-sensitive determination of the elemental composition including information on the bonding states.
• Infrared Spectroscopy (FTIR)
  Analysis of organic components.
• Vapour Phase Decomposition (VPD-ICP-MS)
  Analysis of wafer contamination by etching with hydrofluoric acid vapours, using ICP-MS.

• Laser-induced desorption mass spectrometry (LIMS / LDMS)

   

Determination of Organic Components

• Gas chromatography with mass spectrometer (GC-MS)
  Analysis of organic components in liquids and solids.
• Gas chromatography with flame ionization detector (GC-FID)
  Determination of residual oil in compressed air
• Gas chromatography with thermal conductivity detector and flame ionization detector (GC-WLD-FID)
  Analysis of gases for impurities.
• Infrared spectroskopie (FTIR)
  Analysis of organic components.
• Residual gas MS
  Determination of organic trace contaminants in air and other gases.

• Carbon determination (TOC)
  Determination of inorganic and organically bound C in aqueous solutions down to the ppb range.

   

Thermal Analyses

• Differential scanning calorimetry (DSC)
  Determination of material properties such as melting point, glass transition temperature, ... .
• Thermomechanical analysis (TMA)
  Determination of thermomechanical properties.

• Thermogravimetry (TG)
  Investigation of processes that can be characterized on the basis of mass loss or mass gain.

   

Particle Analysis

• Residual contamination analysis / technical cleanliness (TecSa)
  Extraction and analysis, e.g. according to VDA 19.1 or ISO 16232.
• Air measurements of particles
  Filtration of air and subsequent analysis of the filters.
• Single particle ICP-MS
  Simultaneous detection of particle size distribution and composition of particles in the nm range.

• On- an offline-measurement of particles in liquids using LPC
  Detection of particle sizes in liquids.

   

Electrochemical methods

• Voltammetry / Cyclovoltammetry
  Recording of current-voltage curves to determine the chemical composition of samples.
• Amperometry
  Determination of concentrations using the time-dependent current curve at a constant applied voltage.
• Coulometry
  Determination of concentrations on the basis of Faraday's law.

• Elektrochemical impedance spectroscopy
  Characterization of systems/samples by applying an alternating voltage.

   

Other methods

• Viskometry
  Determination of the viscosimetry/viscosity of media.