Semiconductor industry

Extensive experience

As a former IBM central laboratory for semiconductor and printed circuit board production, we have extensive experience as an analytical laboraty which we have expanded over the years. With this expertise, we are able to support you, for example, in the ultratrace analysis of silicon- and siliconcarbide wafers and in the testing and qualification of semi-finished products and final products for the semiconductor industry. Furthermore, we offer suitable ultracleaning-procedures for your products.

Our offer

Technological developments in the semiconductor industry are placing ever greater demands on the purity of the materials and process media used. We can support you at this point with:

Leachout tests of polymers according to SEMI F40/F57
Residual gas analysis of materials, e.g. according to ASML guide
Ultratrace determination of metallic and ionogenic impurities using ion chromatography (IC) and inductively coupled plasma with mass spectrometry (ICP-MS) on wafers and in process media (gases, ultrapure water).
Particle measurements in chemicals and ultrapure water
Development and implementation of coating and cleaning processes

Eine Chemikerin führt Auslagerungsversuche bzw. Leach-Out-Tests mit Gefäßen und einem Ofen durch

Typical analyses

Typical investigations are:

Analysis of impurities in chemicals using ICP-OES, ICP-MS, GC-MS
Analysis of impurities/deposits in the manufacture of products using SEM-EDX, XPS, FTIR, ICP-OES, ICP-MS, GC-MS, LIBS
Analysis of layers (e.g. composition and thickness) using light microscopy/LIBS orSEM-EDX, also after cross-sectioning, depth profiling using argon sputtering and XPS or using LIBS
Failure analysis

Ein Display zeigt die elektrische Leitfähigkeit einer flüssigen Probe